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ECE 5575 Introduction to Micro and Nano Electro Mechanical Systems (MEMS/NEMS) Cr. 4

General and specialized micro/nanofabrication techniques; basic sensing and actuating mechanisms (piezoresistive, piezoelectric, capacitive, electrostatic, thermal pneumatic, etc.); and design and operation of various MEMS/NEMS devices for automotive and biomedical applications; fabrication and characterization of basic MEMS structures. Offered Winter.